MOVABLE COOLANT CHARGING DEVICE AND COOLING METHOD OF SUBSTRATE MANUFACTURING APPARATUS USING THE SAME

A movable coolant charging apparatus and a method for cooling semiconductor manufacturing equipment using the same are provided to improve productivity and to reduce fabrication costs by reducing a chamber cooling time. A movable coolant charging apparatus is used for cooling semiconductor manufactu...

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Bibliographische Detailangaben
1. Verfasser:	LEE, JUN SEUK
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	A movable coolant charging apparatus and a method for cooling semiconductor manufacturing equipment using the same are provided to improve productivity and to reduce fabrication costs by reducing a chamber cooling time. A movable coolant charging apparatus is used for cooling semiconductor manufacturing equipment composed of a chamber(51) for defining a sealed reaction region, a substrate loading unit in the chamber, a gas spraying unit at an upper portion of the substrate loading unit, and an exhaust unit(57) at a bottom of the chamber. The movable coolant charging apparatus includes a coolant supply unit(110) and a coolant supply line. The coolant supply line(120) is installed between the chamber of the semiconductor manufacturing equipment and the coolant supply unit.