INTEGRATED PROCESS CONDITION SENSING WAFER AND DATA ANALYSIS SYSTEM

INTEGRATED PROCESS CONDITION SENSING WAFER AND DATA ANALYSIS SYSTEM

A process condition measuring device and a handling system may be highly integrated with a production environment where the dimensions of the process condition measuring device are close to those of a production substrate and the handling system is similar to a substrate carrier used for production...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JENSEN EARL M, PAQUETTE BRIAN, SUN MEI H, RENKEN WAYNE GLENN, GORDON ROY
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A process condition measuring device and a handling system may be highly integrated with a production environment where the dimensions of the process condition measuring device are close to those of a production substrate and the handling system is similar to a substrate carrier used for production substrates. Process conditions may be measured with little disturbance to the production environment. Data may be transferred from a process condition-measuring device to a user with little or no human intervention.