APPARATUS FOR CALIBRATION POSITION OF TRANSFERRING ROBOT

A position calibration apparatus for a transfer robot is provided to accurately calibrate a position of the transfer robot by installing a calibration unit which calibrates the position of the transfer robot according to a sort of robot. A calibration plate(74) comes into closely contact with a port...

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Bibliographische Detailangaben
1. Verfasser:	JIN, NAM SOO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	A position calibration apparatus for a transfer robot is provided to accurately calibrate a position of the transfer robot by installing a calibration unit which calibrates the position of the transfer robot according to a sort of robot. A calibration plate(74) comes into closely contact with a portion of an inner surface of a robot. A support plate(72) is attached on the calibration plate at one side of the support plate to support the calibration plate. A fixing pin(76) is provided on the other side of the support plate, so that a pedestal of a chamber is displaced in parallel with the support plate. The calibration plate is adapted to determine a vertical distance, an angle, and a height to a center of the pedestal.