GAUGE FOR CHECKING THE GAP BETWEEN WAFER AND SHOWER HEAD AND METHOD OF CHECKING THE GAP WITH SAME GAUGE

GAUGE FOR CHECKING THE GAP BETWEEN WAFER AND SHOWER HEAD AND METHOD OF CHECKING THE GAP WITH SAME GAUGE

A gauge for checking a gap between a wafer and a showerhead and a method for checking a gap with the same are provided to reduce an error rate by using a height adjustment function. A female screw unit(100) gas a shape of pillar and one flat side. The female screw unit includes a female screw thread...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: JANG, IN HOON
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
SEMICONDUCTOR DEVICES
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:A gauge for checking a gap between a wafer and a showerhead and a method for checking a gap with the same are provided to reduce an error rate by using a height adjustment function. A female screw unit(100) gas a shape of pillar and one flat side. The female screw unit includes a female screw thread which is formed from an opposite side to the inside of the shape of pillar. A male screw unit(200) has a shaped of pillar and one flat side. The male screw unit includes a male screw thread coupled with the female screw thread of the female screw unit. The male screw thread is formed on an end of the shape of pillar. The male screw unit is partially inserted into the female screw unit by the female screw thread and the male screw thread.