CALIBRATION METHOD

CALIBRATION METHOD

A method of calibrating the optical axis (10) of a sensor (6) by obtaining the displacement of the optical axis of the sensor relative to a hand and the displacement of the hand relative to an arm, wherein a teaching tool (11) put in a storage container or a carrying device at a placing position for...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KAWABE MITSUNORI, ADACHI MASARU
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HAND TOOLS
MANIPULATORS
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PERFORMING OPERATIONS
PHYSICS
PORTABLE POWER-DRIVEN TOOLS
SEMICONDUCTOR DEVICES
TESTING
TRANSPORTING
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Beschreibung
Zusammenfassung:A method of calibrating the optical axis (10) of a sensor (6) by obtaining the displacement of the optical axis of the sensor relative to a hand and the displacement of the hand relative to an arm, wherein a teaching tool (11) put in a storage container or a carrying device at a placing position for a semiconductor wafer is detected by the sensor (6) installed on the hand (5) of a robot (1) to teach the position of the semiconductor wafer to the robot (1). In the robot (1), the teaching tool (11) is put at a specified position, the teaching tool (11) is detected by the sensor (6) to predict the position of the teaching tool (11), and a difference between a teaching position where the teaching tool (11) is put and the predicted value is obtained.