APPARATUS FOR TRANSFERRING RETICLE AUTOMATICALLY AND METHOD FOR TRANSFERRING THEREBY

An apparatus for transferring a reticle automatically and a method for transferring thereby are provided to reduce a time for returning the reticle to lithography equipment in order to improve process efficiency. Reticle information is inputted to a computer input device of a reticle shop(S100). The...

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Bibliographische Detailangaben
1. Verfasser: MOON, YEON JIN
Format: Patent
Sprache:eng
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Zusammenfassung:An apparatus for transferring a reticle automatically and a method for transferring thereby are provided to reduce a time for returning the reticle to lithography equipment in order to improve process efficiency. Reticle information is inputted to a computer input device of a reticle shop(S100). The reticle is returned automatically to each stepper through a carrier path(S120). The reticle is put into the each stepper(S140). A lithography process is performed(S160).