PACKAGING DEVICE AND PACKAGING METHOD OF HOLLOW CATHODE TYPE SPUTTERING TARGET

A packaging device and a packaging method for a hollow cathode type spattering target, characterized in that, in the hollow cathode type spattering target, a cover of such a size that can cover the space part of the target is installed, one or a plurality of through holes are formed in the cover, a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	OKABE TAKEO, NAGASAWA MASARU
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING HANDLING THIN OR FILAMENTARY MATERIAL MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGINGARTICLES OR MATERIALS PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS STORING TRANSPORTING UNPACKING
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Beschreibung
Zusammenfassung:	A packaging device and a packaging method for a hollow cathode type spattering target, characterized in that, in the hollow cathode type spattering target, a cover of such a size that can cover the space part of the target is installed, one or a plurality of through holes are formed in the cover, a resin bag is applied onto the through holes, and the inside thereof is evacuated. Thus, even the inside of a hollow part covered by the resin bag can be evacuated.