SUPPORTING DEVICE FOR HEATING CRUCIBLE AND DEPOSITION APPARATUS COMPRISING THE SAME

SUPPORTING DEVICE FOR HEATING CRUCIBLE AND DEPOSITION APPARATUS COMPRISING THE SAME

A device for supporting a heating crucible includes a supporting table having an upper surface in which a plurality of holes are formed, and a contamination prevention plate arranged at an entrance of each of the holes of the supporting table and having an opening portion corresponding to the hole a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: JI, CHANG SOON
Format: Patent
Sprache:eng
Schlagworte:
ELECTRIC HEATING
ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
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Beschreibung
Zusammenfassung:A device for supporting a heating crucible includes a supporting table having an upper surface in which a plurality of holes are formed, and a contamination prevention plate arranged at an entrance of each of the holes of the supporting table and having an opening portion corresponding to the hole and a shield portion extending along an inner wall of the hole.