COATING APPARATUS

PROBLEM TO BE SOLVED: To provide a coater advantageous in space which can continuously coat a glass substrate with a coating liquid. SOLUTION: A pair of parallel rails 2, 2 are installed on a base plate 1, a substrate placing stage 3 is arranged in the center between the rails 2, 2, a first and a se...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: TAKASE SHINJI, YAMAGUCHI KAZUNOBU, YAMAMOTO YUKI, KAJIMA ATSUO, TANIMOTO TSUNEO
Format: Patent
Sprache:eng
Schlagworte:
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