COATING APPARATUS

PROBLEM TO BE SOLVED: To provide a coater advantageous in space which can continuously coat a glass substrate with a coating liquid. SOLUTION: A pair of parallel rails 2, 2 are installed on a base plate 1, a substrate placing stage 3 is arranged in the center between the rails 2, 2, a first and a se...

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Bibliographische Detailangaben
Hauptverfasser:	TAKASE SHINJI, YAMAGUCHI KAZUNOBU, YAMAMOTO YUKI, KAJIMA ATSUO, TANIMOTO TSUNEO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL PERFORMING OPERATIONS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a coater advantageous in space which can continuously coat a glass substrate with a coating liquid. SOLUTION: A pair of parallel rails 2, 2 are installed on a base plate 1, a substrate placing stage 3 is arranged in the center between the rails 2, 2, a first and a second gate-type transfer mechanisms 4, 5 are laid symmetrically about a center line L crossing the rails at a right angle in a width direction of the substrate placing stage as a reference in a plan view and independently across the rails in a freely moving way, and slit nozzles 6, 7 are held to the gate-type transfer mechanisms 4, 5 in a liftable way. COPYRIGHT: (C)2006,JPO&NCIPI