STAGE FOR MOUNTING SUBSTRATE AND METHOD FOR ATTRACTING AND SEPARATING SUBSTRATE

PROBLEM TO BE SOLVED: To provide a substrate-mounting stage permitting horizontal fixing of e.g. a glass substrate without intervening air and easy detachment of substrates. SOLUTION: The stage 1 is divided into two or more concentric areas 1a, 1b, 1c, 1d and 1e, from the planar standpoint, and the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TAKASE SHINJI, YAMAGUCHI KAZUNOBU, KAJIMA ATSUO, TANIMOTO TSUNEO, KIYAMA TAKASHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL PERFORMING OPERATIONS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!