STAGE FOR MOUNTING SUBSTRATE AND METHOD FOR ATTRACTING AND SEPARATING SUBSTRATE

PROBLEM TO BE SOLVED: To provide a substrate-mounting stage permitting horizontal fixing of e.g. a glass substrate without intervening air and easy detachment of substrates. SOLUTION: The stage 1 is divided into two or more concentric areas 1a, 1b, 1c, 1d and 1e, from the planar standpoint, and the...

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Bibliographische Detailangaben
Hauptverfasser:	TAKASE SHINJI, YAMAGUCHI KAZUNOBU, KAJIMA ATSUO, TANIMOTO TSUNEO, KIYAMA TAKASHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL PERFORMING OPERATIONS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a substrate-mounting stage permitting horizontal fixing of e.g. a glass substrate without intervening air and easy detachment of substrates. SOLUTION: The stage 1 is divided into two or more concentric areas 1a, 1b, 1c, 1d and 1e, from the planar standpoint, and the density of suction and jetting holes 2 formed in the most central area 1a is made to be higher than those of the holes formed in the outer areas 1b to 1e. A suction and jetting nozzle 4 is inserted into each hole 2 and connected to a pipe on the back side of the stage 1. Each pipe is connected selectively to a vacuum pump or an air line through a switching valve not shown here. A pipe is arranged in each area so that suction and jetting can be controlled in each area. COPYRIGHT: (C)2006,JPO&NCIPI