INSPECTION SYSTEM AND METHOD FOR PROVIDING FEEDBACK

An inspection system (100) inspects features of an object (130) using a feedback mechanism. The inspection system (100) includes a processor (150) that receives image data (145 or 165) representing the object (130). The processor (150) is operable to determine parameter modification information (450...

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Bibliographische Detailangaben
Hauptverfasser: LI JONATHAN QIANG, CHOPRA NASREEN, BAHARAV IZHAK
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An inspection system (100) inspects features of an object (130) using a feedback mechanism. The inspection system (100) includes a processor (150) that receives image data (145 or 165) representing the object (130). The processor (150) is operable to determine parameter modification information (450) from the image data (145 or 165) and modify an image parameter (400 or 600) used during the production of the image data (145 or 165) with the parameter modification information (450). The modified image parameter (400 or 600) is used during the production of subsequent image data (145 or 165) representing the object (130).