COMPOSITIONS FOR PREPARING LOW DIELECTRIC MATERIALS CONTAINING SOLVENTS

Silica-based materials and films having a dielectric constant of 3.7 or below and compositions and methods for making and using same are disclosed herein. In one aspect, there is provided a composition for preparing a silica-based material comprising an at least one silica source, a solvent, an at l...

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Bibliographische Detailangaben
Hauptverfasser: WEIGEL SCOTT JEFFREY, MACDOUGALL JAMES EDWARD, KHOT SHRIKANT NARENDRA, BRAYMER THOMAS ALBERT, PETERSON BRIAN KEITH, KIRNER JOHN FRANCIS
Format: Patent
Sprache:eng
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