ITO THIN-FILM POLISHING APPARATUS FOR OLED

The present invention relates to a polishing apparatus for polishing glass substrate coated with ITO film, which includes a bottom ejection plate attached with an abrasive pad, a rotation driving device for driving the bottom ejection plate to rotate; a top ejection plate corresponding to the bottom ejection plate and having an abrasive seat disposed on the bottom side thereof for accommodating abrasive material; a cylinder used for the vertically moving top ejection plate to push the top ejection plate downwards and contact with the bottom ejection plate, a gyration driving device connected with the cylinder and driving the top ejection plate to revolve, an abrasive liquid supply device for supplying abrasive liquid to the bottom ejection plate, a rotation control device for controlling the rotation driving device to rotate, a pressure control device for controlling he cylinder to move up and down and exerting pressure, and a gyration control device for controlling the gyration driving device to rotate. The polishing apparatus of the present invention is employed to polish a glass substrate surface coated with ITO film, thereby gaining low light illumination.