RADIATION SENSOR, WAFER, SENSOR MODULE AND METHOD FOR THE PRODUCTION OF A RADIATION SENSOR

Disclosed is a radiation sensor (10) comprising a support (1), a lowered area (2) that is embodied within a surface of the support (1) and can represent a depression or a through hole, a sensor element (4, 4a, 4b) which is embodied above the lowered area (2), preferably on a membrane (3) spanning th...

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Bibliographische Detailangaben
Hauptverfasser:	KARAGOZOGLU HERMANN, SCHILZ JURGEN, HAUSNER MARTIN, PLOTZ FRED
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS COLORIMETRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE PHYSICS RADIATION PYROMETRY SEMICONDUCTOR DEVICES TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	Disclosed is a radiation sensor (10) comprising a support (1), a lowered area (2) that is embodied within a surface of the support (1) and can represent a depression or a through hole, a sensor element (4, 4a, 4b) which is embodied above the lowered area (2), preferably on a membrane (3) spanning the lowered area (2), and electrical contacts (5, 5a, 5b) for the sensor element (4, 4a, 4b). The lowered area (2) has an entirely or partly rounded contour (2a) within the surface of the support (1).