AQUEOUS RESIST STRIPPER FORMULATION

Aqueous resist stripper composition capable of stripping a resist from a resist-coated substrate such as a color filter substrate or a TFT substrate is disclosed. The aqueous resist stripper composition according to the present invention includes 0.3 to 15 % by weight of an inorganic alkaline compou...

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Hauptverfasser: BYEON, WON SU, KIM, WOONG, LIM, CHOUL KYU, JUNG, NAK CHIL, JEONG, YONG MAN, LEE, KWANG YONG, CHA, HYUK JIN
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creator BYEON, WON SU
KIM, WOONG
LIM, CHOUL KYU
JUNG, NAK CHIL
JEONG, YONG MAN
LEE, KWANG YONG
CHA, HYUK JIN
description Aqueous resist stripper composition capable of stripping a resist from a resist-coated substrate such as a color filter substrate or a TFT substrate is disclosed. The aqueous resist stripper composition according to the present invention includes 0.3 to 15 % by weight of an inorganic alkaline compound; 0.1 to 12 % by weight of a tetraalkylammonium hydroxide compound; 0.1 to 40 % by weight of a water-soluble organic solvent; and 33 to 99.5 % by weight of water, based on a total weight of the composition. The aqueous resist stripper composition according to the present invention may be useful to easily and simply remove a variety of resists which are generated during the process of manufacturing TFT-LCD but not easily removed by the con¬ ventional methods, as well as to minimize corrosions of a lower metal layer and a glass substrate during the stripping process, maximize a replacement cycle of the stripper due to its low loss by evaporation and its low aging, and regenerate the color substrate and the TFT substrate at a large scale.
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subjects APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
title AQUEOUS RESIST STRIPPER FORMULATION
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