AQUEOUS RESIST STRIPPER FORMULATION

Aqueous resist stripper composition capable of stripping a resist from a resist-coated substrate such as a color filter substrate or a TFT substrate is disclosed. The aqueous resist stripper composition according to the present invention includes 0.3 to 15 % by weight of an inorganic alkaline compou...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: BYEON, WON SU, KIM, WOONG, LIM, CHOUL KYU, JUNG, NAK CHIL, JEONG, YONG MAN, LEE, KWANG YONG, CHA, HYUK JIN
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Aqueous resist stripper composition capable of stripping a resist from a resist-coated substrate such as a color filter substrate or a TFT substrate is disclosed. The aqueous resist stripper composition according to the present invention includes 0.3 to 15 % by weight of an inorganic alkaline compound; 0.1 to 12 % by weight of a tetraalkylammonium hydroxide compound; 0.1 to 40 % by weight of a water-soluble organic solvent; and 33 to 99.5 % by weight of water, based on a total weight of the composition. The aqueous resist stripper composition according to the present invention may be useful to easily and simply remove a variety of resists which are generated during the process of manufacturing TFT-LCD but not easily removed by the con¬ ventional methods, as well as to minimize corrosions of a lower metal layer and a glass substrate during the stripping process, maximize a replacement cycle of the stripper due to its low loss by evaporation and its low aging, and regenerate the color substrate and the TFT substrate at a large scale.