INSTRUMENT FOR TESTING SOLID-STATE IMAGING DEVICE
A test instrument with high efficiency in which an optical system for illuminating a solid-state imaging device with a test light can be positioned at the solid-state imaging device. The instrument comprises an optical module (35) for illuminating the light-receiving surface of a solid-state imaging...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A test instrument with high efficiency in which an optical system for illuminating a solid-state imaging device with a test light can be positioned at the solid-state imaging device. The instrument comprises an optical module (35) for illuminating the light-receiving surface of a solid-state imaging device with light from a light source through a pinhole, a probe card (20) having a contact needle to be brought into contact with a pad of the solid-stage imaging device, and a motor (30) and holding arm (31) for moving the optical module (35) to a predetermined position with respect to the solid-stage imaging device to be tested through an opening (20h) made in the probe card (20) when the contact needle (21) is in contact with a pad of the solid-stage imaging device. |
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