SACRIFICIAL COMPOSITIONS, METHODS OF USE THEREOF, AND METHODS OF DECOMPOSITION THEREOF

Polymers, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary polymers, among others, includes, a composition having a sacrificial polymer and a pthotoacid generator.

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Bibliographische Detailangaben
Hauptverfasser:	HENDERSON CLIFFORD LEE, JAYACHANDRAN JOSEPH PAUL, WHITE CELESTA E, ALLEN SUE ANN BIDSTRUP, KOHL PAUL A, REED HOLLIE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	Polymers, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary polymers, among others, includes, a composition having a sacrificial polymer and a pthotoacid generator.