CYLINDER TYPE CAPACITOR OF SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME FOR SECURING LARGE CAPACITANCE

PURPOSE: A cylinder type capacitor of a semiconductor device and a manufacturing method thereof are provided to secure large capacitance by using an enhanced storage node electrode structure composed of a first conductive layer and a second conductive layer. CONSTITUTION: A mold oxide layer and an e...

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Bibliographische Detailangaben

Hauptverfasser:	HONG, JONG SEO, LEE, KONG SOO, SONG, CHANG LYONG, AHN, TAE HYUK, JEON, JEONG SIC
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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