APPARATUS FOR AUTOMATICALLY CONTROLLING SAMPLE LEVEL OF FOCUSED ION BEAM DEVICE BY USING ION MICROSCOPE AND METHOD FOR THE SAME, ESPECIALLY ALLOWING ULTRA FINE FABRICATION AT LARGE SCALE AREA

PURPOSE: An apparatus for automatically controlling the sample level of a focused ion beam device by using an ion microscope and a method for the same are provided to compensate the distance between the sample and the ion scanned from the column of the focused ion beam device by automatically adjusting the level of the sample table. CONSTITUTION: An apparatus for automatically controlling the sample level of a focused ion beam device by using an ion microscope includes a liquid metal source(10), an extracting device(20), an iris(32), a Faraday cup(34), an electrostatic lens(36), a column(30), a sample table(40) and an ion microscope(SIM). The extracting device is placed in front of the liquid metal source. The iris filters the discharged ions not to disperse on the space. The Faraday cup measures the amount of ions. The electrostatic lens increases the momentum of ions by increasing the ions. The column focuses the discharge ions adapted to the device characteristics and removes the undesired ions. The sample table is placed at the bottom of the column. And, the ion microscope measures the sample placed on the sample table through the on-line.