VACUUM DEPOSITION DEVICE FOR SIMPLIFYING STRUCTURE OF DEVICE AND IMPROVING WORKABILITY BY INSTALLING VACUUM CHAMBER COMPRISING FIXED CHAMBER AND WORK INDICATION MEAN ATTACHED MOVING CHAMBER

PURPOSE: To provide a vacuum deposition device in which it is not necessary to lift a lower cover or move a work supporting means to or from a vacuum chamber, and repairing operation is easily conducted on various members such as anodes that are installed on the inner surface of the vacuum chamber o...

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Bibliographische Detailangaben
Hauptverfasser: KAWAGUCHI, HIROSHI, SHIMOJIMA, KATUHIKO, FUJII, HIROFUMI
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:PURPOSE: To provide a vacuum deposition device in which it is not necessary to lift a lower cover or move a work supporting means to or from a vacuum chamber, and repairing operation is easily conducted on various members such as anodes that are installed on the inner surface of the vacuum chamber or inside the vacuum chamber. CONSTITUTION: The vacuum deposition device comprises a vacuum chamber(1) comprising a fixed chamber part(6) and a moving chamber part(7) separably connected to the fixed chamber part; a rod type evaporation source(2) attached to the fixed chamber part; a work supporting means(3) attached to the moving chamber part; and a horizontal moving means for horizontally moving the moving chamber part in such a manner that the moving chamber part is connected to or separated from the fixed chamber part in the state that the evaporation source is retreated from the vacuum chamber with being moved to the outside of the vacuum chamber, wherein the evaporation source is installed such that it is moved in or from the vacuum chamber, and the work supporting means is disposed such that the work supporting means surrounds the evaporation source moved into the vacuum chamber.