SEMICONDUCTOR FABRICATION APPARATUS HAVING LIFT DEVICE FOR LOADING WAFER SUSCEPTOR WITHIN PROCESS CHAMBER

PURPOSE: A semiconductor fabrication apparatus having a lift device for loading a wafer susceptor within a process chamber is provided to reduce processing accidents by preventing deflection of a lift pin due to looseness of a fixing screw. CONSTITUTION: An electrostatic chuck(220) is installed on an upper surface of a base(210). A plurality of lift pin holes and a plurality of insertion holes are formed in the electrostatic chuck. A plurality of lift pins(241) are inserted into the lift pin holes in order to support a wafer. A lift pin supporter(240) is used for fixing the lift pins and includes a through-hole connected to the insertion hole. A transfer shaft(250) is coupled to the lift pin supporter. A fixing pin(300) is used for preventing misalignment of the lift pins and the lift pins holes.