GAS SUPPLY APPARATUS WITH RATCHET MECHANISM FOR MANUFACTURING SEMICONDUCTOR

PURPOSE: A gas supply apparatus for manufacturing semiconductor is provided to prevent the wear of a gas storage container and to maintain constant connection intensity between the gas storage container and a gas supply line by using a ratchet mechanism. CONSTITUTION: A gas storage container(10) includes a container neck(13). A main valve(12) switches selectively the container neck. A gas supply line(21) transfers gas from the gas storage container to semiconductor manufacturing equipment. A gas supply nozzle(15) is installed at one side of the container neck and connected to the gas supply line. A line head(20) is installed at one end of the gas supply line. The line head includes a connection hole(22) corresponding to the gas supply nozzle and a ratchet unit(30) for fixing stably the gas supply nozzle to the gas supply line. A convexoconcave portion(18) is formed on the gas supply nozzle.