APPARATUS FOR INSPECTING WAFER EDGE TO REDUCE TIME FOR INSPECTION PROCESS

PURPOSE: An apparatus for inspecting a wafer edge is provided to reduce a time for an inspection process and enhance reliability by inspecting a defect of a wafer edge according to intensity of light reflected from the wafer edge. CONSTITUTION: A chuck(110) is used for supporting a wafer. A pluralit...

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Bibliographische Detailangaben

1. Verfasser:	KIM, HUI DEOK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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