1,2-NAPHTHOQUINONE-2-DIAZIDESULFONATE-BASED SENSITIZER SHOWING NO I-LINE ABSORPTION AND HAVING IMPROVED SOLUBILITY AND PHOTORESIST COMPOSITION CONTAINING THE SENSITIZER

PURPOSE: Provided are a 1,2-naphthoquinone-2-diazidesulfonate-based sensitizer which can be prepared by easily, shows no i-line absorption and is improved in solubility by converting some of the hydroxyl group of a cyclic polyhydroxy compound into a 1,2-naphthoquinone-2-diazidesulfonyl group and an...

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Bibliographische Detailangaben
Hauptverfasser:	MIYAZAKI TSUNEAKI, TADA KATSUMI, KATORI SUEHIRO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ACYCLIC OR CARBOCYCLIC COMPOUNDS APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR METALLURGY ORGANIC CHEMISTRY ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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