METHOD FOR STACKING VERTICALLY SELF ASSEMBLED QUANTUM DOTS BY USING TEMPERATURE CHANGE METHOD IN CAPPING LAYER FORMATION PROCESS

PURPOSE: A method for stacking vertically self assembled quantum dots by using a temperature change method in capping layer formation process is provided to stack vertically single layer quantum dots by improving surface uniformity of a capping layer. CONSTITUTION: A buffer layer is formed on an upp...

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Bibliographische Detailangaben

Hauptverfasser:	PARK, GWANG MIN, HWANG, HUI DON, YOON, UI JUN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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