METHOD FOR FABRICATING LCD SIMPLIFY PROCESSES BY CONSIDERABLY REDUCING THE NUMBER OF MASKS
PURPOSE: A method for fabricating an LCD(Liquid Crystal Display) is provided to simplify processes by considerably reducing the number of masks for fabricating a TFT(Thin Film Transistor). CONSTITUTION: The first mask is applied to form a gate electrode(301) on a substrate(300). A gate insulation fi...
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Sprache: | eng ; kor |
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Zusammenfassung: | PURPOSE: A method for fabricating an LCD(Liquid Crystal Display) is provided to simplify processes by considerably reducing the number of masks for fabricating a TFT(Thin Film Transistor). CONSTITUTION: The first mask is applied to form a gate electrode(301) on a substrate(300). A gate insulation film and an active layer are successively formed on the gate electrode. A PR(PhotoResist) is coated on the active layer, and the second mask is applied to remove the PR of a source/drain region part. The active layer which exists in the source/drain region part is removed. Source and drain electrodes(306a,306b) are formed on the result material. A protective film(307) and a PR are successively formed on the result material, and the third mask is applied to define a pixel region part. The protective film, the active layer and the gate insulation film which exist on the pixel region are removed. A pixel electrode(309a) is formed on the result material. |
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