METHOD FOR FORMING THIN FILM OF SEMICONDUCTOR DEVICE TO CONTROLS EASILY REACTION CONDITIONS

PURPOSE: A method for forming a thin film of a semiconductor device is provided to activate only particular reaction materials and controls easily reaction conditions by introducing reaction materials onto the semiconductor substrate within a chamber. CONSTITUTION: A semiconductor substrate(110) is...

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Bibliographische Detailangaben
Hauptverfasser:	KIM, HYO JEONG, KO, CHANG HYEON, HWANG, GI HYEON
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PERFORMING OPERATIONS PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SEMICONDUCTOR DEVICES SPRAYING OR ATOMISING IN GENERAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE: A method for forming a thin film of a semiconductor device is provided to activate only particular reaction materials and controls easily reaction conditions by introducing reaction materials onto the semiconductor substrate within a chamber. CONSTITUTION: A semiconductor substrate(110) is loaded into a chamber. A plurality of reaction materials are introduced onto the semiconductor substrate. Molecules of the reaction materials are activated by providing necessary energy. A thin film is formed on an upper surface of the semiconductor substrate by activating the molecules of the reaction materials.