WAFER CASSETTE AND WAFER TRANSFER APPLIED TO THE SAME WAFER CASSETTE

WAFER CASSETTE AND WAFER TRANSFER APPLIED TO THE SAME WAFER CASSETTE

PURPOSE: A wafer cassette and a wafer transfer arm applied to the same wafer cassette are provided to prevent deflection of a wafer by installing a wafer support plate at an intermediate part of a slot. CONSTITUTION: A body(53) includes an open front part in order to input and output a wafer(W) tran...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: LEE, YEONG GI
Format: Patent
Sprache:eng ; kor
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:PURPOSE: A wafer cassette and a wafer transfer arm applied to the same wafer cassette are provided to prevent deflection of a wafer by installing a wafer support plate at an intermediate part of a slot. CONSTITUTION: A body(53) includes an open front part in order to input and output a wafer(W) transferred by a transfer arm. A plurality of slots are formed on both sides of the inside of the body. An edge of the wafer is inserted into the slot of the body. A plurality of wafer support plates(59) are located at each intermediate part of the slots. The wafer support plates cross the inside of the body. Each wafer support plate has a flat structure. Each wafer support plate is formed with a rectangular plate having the predetermined with and length.