substrate drying system including air-knife

PURPOSE: A device for drying a substrate including air knives is provided to supply one pair of air knives that include the first and second spray portions for spraying compressed air in different directions, thereby preventing stains caused by residual moisture. CONSTITUTION: Lower air knives(130a,140a) comprise as follows. One ends(132a,142a) spray compressed air in a directional substantially vertical to a mobile direction of a substrate(1), starting from one edge of the substrate(1), respectively. Other ends(134a,144a) spray the compressed air toward opposite edges in a direction diagonal to one edge, when starting from the identical edge. A part contacted with the compressed air for the first time through the upper/lower air knives(130a,140a) refers to the first edge(1a). A part adjacent to the first edge(1a) refers to the second edge(1b). A part opposite to the first edge(1a) in diagonal direction refers to the third edge(1c). The rest one part adjacent to the first edge(1a) refers to the fourth edge(1d). 본 발명은 기판의 상면과 배면을 노출시킨 상태로, 상기 기판을 운반하는 이송수단과; 상기 기판을 사이에 두고 서로 마주보도록 대향하며, 각각 제 1 방향으로 상기 압축공기를 분사하는 제 1 분사부와, 제 2 방향으로 상기 압축공기를 분사하는 제 2 분사부를 포함하는 한 쌍의 에어나이프를 포함하는 기판건조장치를 제공한다.