Method for measuring concentration of Nitrogen of N-doped silicon single crystal

PURPOSE: A method for measuring concentration of nitrogen of nitrogen-doped silicon single crystal is provided, thereby enabling repeated measurement of the nitrogen concentration, reducing the measurement time, and measuring the nitrogen concentration using FTIR(fourier transform infrared). CONSTIT...

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Bibliographische Detailangaben

Hauptverfasser:	CHOI, DAE RIM, LEE, SUN HYEON
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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