CONVEYANCE DEVICE FOR CONVEYING SEQUENTIALLY BAND-SHAPED WORK WITHOUT ADHERING PARTICLES TO BAND-SHAPED WORK

PURPOSE: A conveyance device for conveying sequentially band-shaped works to without adhering particles to the belt-shaped works is provided to prevent defects due to particles by forming a holding face of the band-shaped work with a porous sintered body. CONSTITUTION: A conveyance device for band-s...

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Bibliographische Detailangaben
1. Verfasser:	TAKAMATSU HIROSUKE
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HANDLING THIN OR FILAMENTARY MATERIAL HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS,CABLES HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PACKING PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES STORING TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE: A conveyance device for conveying sequentially band-shaped works to without adhering particles to the belt-shaped works is provided to prevent defects due to particles by forming a holding face of the band-shaped work with a porous sintered body. CONSTITUTION: A conveyance device for band-shaped work includes a work stage, a box body, and a gas feeding port. The work stage(70) is used for forming a holding face of a band-shaped work by a porous sintered body(71). The porous sintered body is installed on one side face of the box body(72). The gas feeding port is provided in the sintered body or in the vicinity of the sintered body. Only vacuum is supplied into the box body and only gas is supplied into the gas feeding port.