METHOD AND APPARATUS FOR IMPROVING SILICON PROCESSING EFFICIENCY

PURPOSE: Provided is a method for processing polycrystalline silicon workpieces to form size distributions of polycrystalline silicon pieces suitable for use in a Czochralski-type process. CONSTITUTION: A polycrystalline silicon workpiece is prepared by a chemical vapor deposition process. The polyc...

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Hauptverfasser:	GRAHAM TODD STANLEY, HORSTMAN TERENCE LEE, SCHMIDT CHRIS TIM, ARVIDSON ARVID NEIL, MESSNER KATHRYN ELIZABETH
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMISTRY COMPOUNDS THEREOF CRYSTAL GROWTH INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS OTHER SEPARATING BY DRY METHODS APPLICABLE TO BULK MATERIAL,e.g. LOOSE ARTICLES FIT TO BE HANDLED LIKE BULK MATERIAL PERFORMING OPERATIONS PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SEPARATING SOLIDS FROM SOLIDS SEPERATING SOLIDS FROM SOLIDS BY SIEVING, SCREENING, ORSIFTING OR BY USING GAS CURRENTS SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH SORTING TRANSPORTING UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	PURPOSE: Provided is a method for processing polycrystalline silicon workpieces to form size distributions of polycrystalline silicon pieces suitable for use in a Czochralski-type process. CONSTITUTION: A polycrystalline silicon workpiece is prepared by a chemical vapor deposition process. The polycrystalline silicon workpiece fractures into a mixture of polycrystalline silicon pieces, where the polycrystalline silicon pieces have varying sizes. The mixture of polycrystalline silicon pieces sorts into at least two size distributions. The sorting step is carried out using a rotary indent classifier. The rotary indent classifier includes a rotating cylinder(200) and a conveyor(408). The cylinder(200) further includes a circumferential edge with indents arrayed in increasing size from a first end(210) of the cylinder to a second end(220) of the cylinder. The conveyor is longitudinally elongated, adjacent the cylinder for conveying silicon pieces from the first end of the cylinder to the second end of the cylinder.