A strurcture and manufacture method of optical switch that can be manufacture on single wafer with PLC mirror and actuator
PURPOSE: A structure of an optical switch for forming an optical waveguide, a mirror, and an actuator on a single substrate and a fabricating method thereof are provided to control the direction of light transmission and reduce a manufacturing cost by using the optical waveguide. CONSTITUTION: A sac...
Gespeichert in:
Hauptverfasser: | , , , , , |
---|---|
Format: | Patent |
Sprache: | eng ; kor |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Schreiben Sie den ersten Kommentar!