A SEMICONDUCTOR DEVICE OF A SEARCH ALIGN KEY WITH A DENSE FORM

PURPOSE: A semiconductor device of a search align key with a dense form is provided to guarantee a good photo signal corresponding to the dense search align key formed in a semiconductor substrate by reducing an etch degree by a chemical mechanical polishing(CMP) process. CONSTITUTION: The semicondu...

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Bibliographische Detailangaben
Hauptverfasser:	JUN, BONG SEOK, LEE, CHUNG JAE
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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