A SEMICONDUCTOR DEVICE OF A SEARCH ALIGN KEY WITH A DENSE FORM

PURPOSE: A semiconductor device of a search align key with a dense form is provided to guarantee a good photo signal corresponding to the dense search align key formed in a semiconductor substrate by reducing an etch degree by a chemical mechanical polishing(CMP) process. CONSTITUTION: The semicondu...

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Bibliographische Detailangaben
Hauptverfasser:	JUN, BONG SEOK, LEE, CHUNG JAE
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PURPOSE: A semiconductor device of a search align key with a dense form is provided to guarantee a good photo signal corresponding to the dense search align key formed in a semiconductor substrate by reducing an etch degree by a chemical mechanical polishing(CMP) process. CONSTITUTION: The semiconductor substrate(200) is of a roughness type, including search align keys(230a,232a,234a,236a,238a) having different space intervals in the X-Y direction. The space interval between the search align keys is a size of a predetermined limit that can be recognized by photolithography equipment. 본 발명은 포토 작업시에 이용되는 반도체 기판의 스크라이브 라인(SCRIBE LINE)에 형성된 조밀한 서치 얼라인 키(SEARCH ALIGN KEY)를 갖는 반도체 장치를 개시한다. 상기 반도체 장치는 니콘(NIKON) 포토 장비에서 인식할 수 있는 서치 얼라인 키로 구성된 마크(MARK) 구조를 변경하여, 포토 작업시에 포토 장비가 반도체 기판의 중심을 잡는 서치 얼라인을 위한 시그널(SIGNAL) 검출을 안정적으로 해서 상기 포토 작업을 원활히 수행하게 해준다.