Metal shadowmask supporting device using magnetic force for vacuum deposition

PURPOSE: A shadow mask support device is provided to allow for ease of attachment/detachment of shadow mask, while reducing manufacturing costs. CONSTITUTION: A shadow mask support device(30) comprises a fixing unit(32) for supporting and fixing a substrate(31); a fixing plate(34) disposed on the fi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KIM, JIN GYU, JUNG, GYEONG HUN, SONG, GWAN SEOP, HAN, SANG JIN
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:PURPOSE: A shadow mask support device is provided to allow for ease of attachment/detachment of shadow mask, while reducing manufacturing costs. CONSTITUTION: A shadow mask support device(30) comprises a fixing unit(32) for supporting and fixing a substrate(31); a fixing plate(34) disposed on the fixing unit, and which permits a shadow mask(33) to tightly contact the lower surface of the substrate by the magnetic force of the permanent magnet during the deposition process; and an alleviating unit(35) interposed between the fixing plate and the substrate and spaced apart from the fixing plate, wherein the alleviating unit is connected to the fixing plate so as to alleviate magnetic forces of the fixing plate. 본 발명은 자력식 증착용 섀도우마스크 지지장치를 개시한다. 본 발명은 기판을 지지하여 고정하는 고정수단과; 상기 기판 고정수단의 상부에 위치하여 증착공정시 영구자석에 의한 자력(磁力)으로 새도우마스크를 상기 기판의 하면에 수직 밀착시키는 고정판과; 상기 고정판과 기판의 사이에서 상기 고정판과 소정간격 이격되어 상기 고정판에 연결되며 상기 고정판의 자력을 완화하는 완화수단을; 포함하는 자력식 증착용 섀도우마스크 지지장치를 제공한다.