1,2-NAPHTHOQUINONE-2-DIAZIDESULFONATE-BASED SENSITIZER, PREPARATION METHOD THEREOF AND PHOTORESIST COMPOSITION

1,2-NAPHTHOQUINONE-2-DIAZIDESULFONATE-BASED SENSITIZER, PREPARATION METHOD THEREOF AND PHOTORESIST COMPOSITION

PURPOSE: A 1,2-naphthoquinone-2-diazidesulfonate-based sensitizer, its preparation method and a photoresist composition containing the sensitizer are provided, to obtain a satisfactory sensitivity, an excellent storage stability and a high solubility in solvents. CONSTITUTION: The 1,2-naphthoquinone...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MIYAZAKI TSUNEAKI, SUWA MIHARU, IIDA HIROTADA, TADA KATSUMI, HAGIWARA YUICHI, KATORI SUEHIRO
Format: Patent
Sprache:eng ; kor
Schlagworte:
ACYCLIC OR CARBOCYCLIC COMPOUNDS
APPARATUS SPECIALLY ADAPTED THEREFOR
CHEMISTRY
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
METALLURGY
ORGANIC CHEMISTRY
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Zusammenfassung:PURPOSE: A 1,2-naphthoquinone-2-diazidesulfonate-based sensitizer, its preparation method and a photoresist composition containing the sensitizer are provided, to obtain a satisfactory sensitivity, an excellent storage stability and a high solubility in solvents. CONSTITUTION: The 1,2-naphthoquinone-2-diazidesulfonate-based sensitizer is prepared by reacting a polyphenol with a,2-naphthoquinone-2-diazidesulfonyl chloride in the presence of a neutralizing agent, wherein the polyphenol is obtained by condensation of resorcinol and at least one aldehyde selected from C3-C10 aldehydes and comprises a compound represented by the formula 1 (wherein R1, R2, R3 and R4 are independently an alkyl group of C2-C9) as a main component and 10 wt% or less of a compound having a shorter retention time measured by using GPC than that of the compound of the formula 1. The photoresist composition comprises the 1,2-naphthoquinone-2-diazidesulfonate-based sensitizer; and an alkali-soluble resin.