Method for screening short defects between bitline and buried contact in semiconductor memory device
PURPOSE: A method is provided to screen short defect between a bit line and a buried contact efficiently in a semiconductor memory device with a short screen time. CONSTITUTION: According to the method for screening short defect between a bit line and a buried contact in a semiconductor memory devic...
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Format: | Patent |
Sprache: | eng ; kor |
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Zusammenfassung: | PURPOSE: A method is provided to screen short defect between a bit line and a buried contact efficiently in a semiconductor memory device with a short screen time. CONSTITUTION: According to the method for screening short defect between a bit line and a buried contact in a semiconductor memory device, the above semiconductor memory device is activated one time at first. Then, a disturb operation is performed repetitively during a refresh time defined in the specification of the semiconductor memory device. And the semiconductor memory device is precharged one time.
반도체 메모리장치에서 비트라인과 베리드 콘택 사이의 숏트 불량을 효과적으로 스크린하고 스크린 시간이 짧은 스크린 방법이 개시된다. 상기 스크린 방법은, 상기 반도체 메모리장치를 처음에 한번만 액티브시키는 제1단계, 상기 제1단계 후 상기 반도체 메모리장치의 사양에 정의된 리프레쉬 타임동안 디스터브(Disturb) 동작을 반복적으로 수행하는 제2단계, 및 상기 제2단계 후 상기 반도체 메모리장치를 한번만 프리차지시키는 제3단계를 구비하는 것을 특징으로 한다. |
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