Apparatus of probe type deep-level transient spectroscopy

PURPOSE: A probe type DLTS(Deep-Level Transient Spectroscopy) is provided to measure characteristics of a magnetodiode effectively by connecting an electrode pad and both terminals of a capacitance measuring machine. CONSTITUTION: A probe type DLTS(Deep-Level Transient Spectroscopy) includes a vacuu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHOI, GYEONG JIN, LEE, JONG RAM
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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