Method for prevention of frost in semiconductor test handler

PURPOSE: A method for preventing frost of a semiconductor device test handler is provided to minimize the generation of the frost by using the contact between the cooling fluid and the external air. CONSTITUTION: A test site of a handler includes a preheating portion, a test socket(3), and an index...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HWANG, HYEON JU, RYU, GEUN HO
Format: Patent
Sprache:eng ; kor
Schlagworte:
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