The manufacturing method of Piezo Ceramics Actuator which is used Multi layer _Bimorph type

PURPOSE: A method for fabricating a piezoelectric ceramic actuator of multi-layered bimorph type is provided to improve shortcomings of a stacked piezoelectric device and a bimorph type piezoelectric device by using a plurality of multi-layered bimorph type piezoelectric ceramic devices. CONSTITUTION: A metallic elastic plate is used as a central electrode. A bimorph type actuator is formed by attaching the metallic elastic plate with two sheets of thin piezoelectric ceramic plates. A micro actuator is formed by combining the multi-layered bimorph type actuators with an operating bar. One side of the thin piezoelectric ceramic plates is expanded when a voltage is applied to the thin piezoelectric ceramic plates. The other side of the thin piezoelectric ceramic plates is contracted when the voltage is applied to the thin piezoelectric ceramic plates. The metallic elastic plate is changed by elasticity of the thin piezoelectric ceramic plates. The operating bar is operated by the change of the operating bar. 본 발명은 여러 개의 바이몰프형 압전세라믹스 액츄에이터를 여러층으로 구성하여 초소형 액츄에이터를 제작하는 방법에 관한것이다. 즉, 금속탄성판을 중심전극으로 2장의 압전세라믹스의 얇은 판을 접합시킨 바이몰프(Bimorph)형 액츄에이터를 여러층으로 배열하여 작동봉과 결합시켜 초소형 액츄에이터를 구성한 것이다. 2장의 세라믹은 인가전압에 의해 한면은 늘어나고 다른 한면은 수축하도록 만들어 금속탄성판이 굴곡변위를 가지게 되며 여러층으로 접합시킨 바이몰프형 액츄에이터의 탄성금속판이 굴곡변위를 가지게 되고 작동봉이 구동하게 된다.