Baking apparatus for manufacturing semiconductor devices

PURPOSE: A baking apparatus for fabricating a semiconductor device is provided to prevent a semiconductor substrate from being installed over a guide by mounting an optical sensor capable of inspecting a settlement state of the semiconductor substrate on a cover or the guide. CONSTITUTION: The semic...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JANG, SEONG IL, KONG, JONG TAK, MIN, BYEONG HO, LEE, GYU MYEONG
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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