Heater assembly for heating a wafer

PURPOSE: A heater assembly for heating a wafer is provided to reduce a thermal difference between a center part and a peripheral part of a wafer and enlarge an exchange period of a heater. CONSTITUTION: A heater assembly(900) is formed with a heater(100), a power supply portion(200), and a support p...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PARK, CHUNG HUN, SONG, EUN SEOK, PARK, JAE HAN, HONG, HYEONG SIK, KUEM, GYEONG SU
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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