TOC MEASURE APPARATUS FOR A SEMICONDUCTOR DEVICE FABRICATION INSTALLATION AND TOC MEASURE METHOD FOR USING THE APPARATUS

PURPOSE: An apparatus for measuring total organic carbon(TOC) in a semiconductor fabricating process is provided to monitor and control the level changing in unit process equipment by abstracting a sample of chemical liquid from a process bath, and to improve analyzing reliability and minimize a dam...

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Bibliographische Detailangaben
Hauptverfasser:	HUH, YONG U, KIL, JUN ING, RYU, JAE JUN, KIM, GYEONG DAE
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PURPOSE: An apparatus for measuring total organic carbon(TOC) in a semiconductor fabricating process is provided to monitor and control the level changing in unit process equipment by abstracting a sample of chemical liquid from a process bath, and to improve analyzing reliability and minimize a damage of an analyzer by previously removing the air bubbles flowing in the analyzer together with the sample of chemical liquid. CONSTITUTION: A predetermined process of reacting with a layer formed on a wafer is performed in a process bath(110) included in process equipment. One of at least one kind of fluid for performing the process is abstracted as a sample from the process bath and supplied by an abstracting unit. The analyzer(140) analyzes the density of TOC included in the sample supplied from the abstracting unit. 본 발명은 습식식각 공정에서 사용되는 약품 및 초순수에 대한 티오씨 농도 자동 측정 장치 및 그 측정 방법에 관한 것으로, 티오씨 농도 자동 측정 장치는 공정수행을 위한 하나 이상의 종류의 유체 중 어느 하나를 공정조로부터 표본으로 추출하여 서로 다른 라인으로 선별적으로 분기되도록 공급하는 추출수단과, 추출수단에 연결되어서 상기 유체에 포함될 수 있는 기포를 걸러내는 버핑수단 그리고 일측은 상기 추출수단에 연결되며 타측은 상기 버핑수단에 연결되어서 상기 유체에 포함되어 있는 티오씨의 농도를 분석하는 분석기로 이루어진다.