SLIP GUARD RING OF SEMICONDUCTOR ANNEALING EQUIPMENT
PURPOSE: A slip guard ring of semiconductor annealing equipment is provided to easily inspect the level and the interval between respective slip guard rings by decreasing the number of the pieces of the slip guard ring, and to reduce a wafer edge effect caused by thermal ununiformity by precisely se...
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| Format: | Patent |
| Sprache: | eng ; kor |
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| Zusammenfassung: | PURPOSE: A slip guard ring of semiconductor annealing equipment is provided to easily inspect the level and the interval between respective slip guard rings by decreasing the number of the pieces of the slip guard ring, and to reduce a wafer edge effect caused by thermal ununiformity by precisely setting the slip guard ring. CONSTITUTION: A wafer(10) is placed on a hot liner(50). A two-piece slip guard ring(60) of a ring type surrounds the hot liner, having a uniform interval between respective pieces. A uniform interval(40) is maintained between the two-piece slip guard ring and the hot liner. |
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