THERMAL ANNEAL METHOD OF MAGNETIC TUNNEL JUNCTION AND MAGNETIC TUNNELING JUNCTION FABRICATED BY THE METHOD

PURPOSE: A magnetic tunnel junction device and a thermal anneal method thereof are provided to improve the TMR(Tunneling Magnetoresistance) rate and optimize the characteristics of the device in a shorter time more effectively by reducing the bent of an oxide layer(Tunnel Barrier Layer). CONSTITUTIO...

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Bibliographische Detailangaben
Hauptverfasser: HA, JAE GEUN, SHIN, GYEONG HO, LEE, U YEONG, LEE, GYEONG IL, PARK, YEONG JUN
Format: Patent
Sprache:eng ; kor
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