TEMPERATURE SENSOR DEVICE IN CLEAN ROOM

PURPOSE: A clean room temperature sensor apparatus is provided to achieve improved temperature response characteristics, while allowing maintenance to be easily performed. CONSTITUTION: A clean room temperature sensor apparatus, comprises a housing(30); a cover pipe(40) protruded from the outer peri...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PARK, DEOK GYU, LEE, BYEONG CHAN, PARK, JAE CHAN, KIM, JONG HAN
Format: Patent
Sprache:eng ; kor
Schlagworte:
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